Design And Performance Optimization Of Cmos-Mems Integrated Pressure Sensors For Biometric Fingerprint Applications

Abstract

The integration of Complementary Metal-Oxide Semiconductor (CMOS) technology with Micro-Electro-Mechanical Systems (MEMS) has emerged as a transformative approach for developing compact, high-performance sensing systems. This study presents the design, simulation, and analysis of advanced piezoresistive pressure sensing structures integrated with operational amplifier-based signal conditioning circuits. Three novel configurations—non-inverting amplifier, summing amplifier, and differential amplifier—are proposed to enhance pressure sensitivity and output performance. Furthermore, a current mirror-based pressure sensor (CM-PS) and its improved variant incorporating differential amplification (CM&DA-PS) are investigated. Simulation results demonstrate significant improvements in full-scale output voltage, sensitivity, and thermal stability. Additionally, the work explores the integration of pressure sensing with biometric fingerprint recognition technologies, highlighting the applicability of CMOS-MEMS systems in secure identification and embedded applications. The findings confirm that monolithic CMOS-MEMS integration offers a scalable, cost-effective solution for next-generation smart sensing and biometric systems.